Onto Innovation

Onto Innovation — Acquisitions

Every M&A deal made by Onto Innovation, sorted by date.

📍 Wilmington, United States Total deals 4 Total value $545.0M View company profile →
4
Total deals
$545.0M
Total value
$545.0M
Avg deal
$545.0M
Largest
Acquisition activity by year
Deals announced per year
19 21 24 25
# Acquired Date Type Status Price
1
S
Semilab International’s Materials Analysis Business
Semilab International’s Materials Analysis Business is a unit of Semilab Interna…
2025-06-30 Acquisition Complete $545.0M Deal →
2
Lumina Instruments
Lumina Instruments develops laser optical scanning equipment for the rapidly exp…
2024-10-31 Acquisition Complete Deal →
3
Inspectrology
Inspectrology is a supplier of overlay metrology for controlling lithography and…
2021-01-08 Acquisition Complete Deal →
4
Nanometrics
Nanometrics is a leading provider of advanced, high-performance process control …
2019-10-28 Merge Complete Deal →